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Title Pressure achieved in low-outgassing chambers using NEG and ion pumps with XHV gauges
Abstract Previously we reported the outgassing rates for stainless steel chambers following various heat treatments and surface coatings . In this paper, we present the pressure measurements for these chambers after the addition of NEG and ion pumps, we discuss the considerations for using commerical gauges near the XHV pressure regime, and we compare the measured pressure with that predicted using outgassing rate and pump speed. We find that though the measured outgassing rates varied from 1.8x10 12 TorrLs-1cm-2 to 2x10-16 TorrLs-1cm-2, the pressure achieved in each chamber varied minimally. From these results, we conclude that the outgassing rate measured for the TiN coated chamber was artificially low as a result of a small pump speed in the coating which invalidated the outgassing rate measurement technique. Additionally, we demonstrate that gauge background effects are significant at these pressures, but that at least one commercial gauge has not reached its pressure measurment limit.
Author(s) Marcy Stutzman, Philip Adderley, Abdullah Mamun, M. Poelker
Publication Date To Appear in 2021
Document Type Journal Article
Primary Institution Thomas Jefferson National Accelerator Facility, Newport News
Affiliation Accelerator Ops, R&D / Ctr For Injectors&Sources / Ctr for Injectors&Sources
Funding Source Nuclear Physics (NP)
Proprietary? No
This publication conveys Technical Science Results
Document Numbers
JLAB Number: JLAB-ACC-19-2933 OSTI Number:
LANL Number: Other Number: DOE/OR/23177-4678
Associated with an experiment No
Associated with EIC No
Supported by Jefferson Lab LDRD Funding No
Journal Article
Journal Name Journal of Vacuum Science & Technology A
Refereed Yes
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